Smart sensors, actuators, and MEMS III
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Smart sensors, actuators, and MEMS III 2-4 May 2007, Maspalomas, Gran Canaria, Spain

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Published by SPIE in Bellingham, Wash .
Written in English

Subjects:

  • Microelectromechanical systems -- Congresses.,
  • Microtechnology -- Congresses.,
  • Actuators -- Industrial applications -- Congresses.,
  • Detectors -- Industrial applications -- Congresses.,
  • Scanning systems -- Congresses.

Book details:

Edition Notes

Includes bibliographical references and indexes.

StatementThomas Becker, Carles Cané, N. Scott Barker, editors.
GenreCongresses.
SeriesProceedings of SPIE -- v. 6589
ContributionsBecker, Thomas., Cané, Carles., Barker, N. Scott
Classifications
LC ClassificationsTK7875 .S6354 2007
The Physical Object
Pagination1 v. (various pagings) :
ID Numbers
Open LibraryOL22852463M
ISBN 109780819467171
LC Control Number2007299456

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  Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface. Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power. Sensors and Actuators: Engineering System Instrumentation, Second Edition provides users from a variety of engineering backgrounds with a complete overview of engineering system components for instrumentation. It presents current techniques, advanced theory and concepts, and addresses relevant design issues, component selection, and practical Cited by: 3.

Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon Author: Ulrich Schmid.   Abstract. Over the past 30 years, significant progress has been made in the fields of Micro-Electro-Mechanical Systems (MEMS). Originally, the term MEMS was used in the United States to signify electromechanical sensors and actuators that are based on : Vishwas N. Bedekar, Khalid Hasan Tantawi. 19 Smart energy management and low-power design of sensor and actuator nodes on algorithmic level for self-powered sensorial materials and robotics [] S. Bosse, T. Behrmann, Univ. of. sensors are current/voltage output temperature sensors, microphone transducers, and even the potentiometer, which is a rotational position sensor. Inside every smart sensor is one or more primitive sensors and support circuitry. The thing that makes a smart sensor "smart" is .

  The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing . PROCEEDINGS VOLUME Smart Sensors, Actuators, and MEMS II. Editor(s): Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu *This item is only Smart sensors modeling using VHDL-AMS for micro instruments implementation with a distributed architecture.   Microelectromechanical system (MEMS) reveals excellent flexibility and adaptability in miniaturization devices owing to its compact dimension, low power consumption, and fine performance. As a typical type of miniaturization tool, MEMS-based robotic microgripper has been widely employed in the manipulation of tiny micro-objects, material characterizations, and so by: Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail/5(3).